The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 12, 2015
Filed:
May. 31, 2012
Applicants:
Hidenori Miyamoto, Kawasaki, JP;
Tsutomu Sahoda, Kawasaki, JP;
Inventors:
Hidenori Miyamoto, Kawasaki, JP;
Tsutomu Sahoda, Kawasaki, JP;
Assignee:
Tokyo Ohka Kogyo Co., Ltd., Kawasaki-shi, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05C 13/02 (2006.01); F24J 3/00 (2006.01); F27B 5/16 (2006.01); H01L 21/67 (2006.01); H01L 21/677 (2006.01); H01L 31/032 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67173 (2013.01); H01L 21/67109 (2013.01); H01L 21/67253 (2013.01); H01L 21/6776 (2013.01); Y02E 10/541 (2013.01); H01L 31/0322 (2013.01); H01L 31/0326 (2013.01);
Abstract
A heating apparatus including: a first heating part and a second heating part between which a substrate having a coating film is disposed at a substrate position in the film thickness direction; and a distance control part which controls at least one of a first distance between the substrate position and the first heating part and a second distance between the substrate position and the second heating part.