The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 05, 2015

Filed:

Jun. 03, 2010
Applicants:

Po-feng Tsai, Taipei, TW;

Yen-di Tsen, Chang-Ho, TW;

JO Fei Wang, Hsin-Chu, TW;

Jong-i Mou, Hsinpu Township, TW;

Inventors:

Po-Feng Tsai, Taipei, TW;

Yen-Di Tsen, Chang-Ho, TW;

Jo Fei Wang, Hsin-Chu, TW;

Jong-I Mou, Hsinpu Township, TW;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G06F 19/00 (2011.01); G05B 11/01 (2006.01); G05B 17/02 (2006.01); G05B 15/00 (2006.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
G05B 17/02 (2013.01); H01L 22/20 (2013.01);
Abstract

A method of extending advanced process control (APC) models includes constructing an APC model table including APC model parameters of a plurality of products and a plurality of work stations. The APC model table includes empty cells and cells filled with existing APC model parameters. Average APC model parameters of the existing APC model parameters are calculated, and filled into the empty cells as initial values. An iterative calculation is performed to update the empty cells with updated values.


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