The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 05, 2015

Filed:

Jun. 07, 2007
Applicants:

Martinus Petrus Maria Bierhoff, Deurne, NL;

Bart Buijsse, Eindhoven, NL;

Cornelis Sander Kooijman, Veldhoven, NL;

Hugo Van Leeuwen, Eindhoven, NL;

Hendrik Gezinus Tappel, Casteren, NL;

Colin August Sanford, Atkinson, NH (US);

Sander Richard Marie Stoks, Nijmegen, NL;

Steven Berger, Newburyport, MA (US);

Ben Jacobus Marie Bormans, Asten, NL;

Koen Arnoldus Wilhelmus Driessen, Valkenswaard, NL;

Johannes Antonius Hendricus W.g. Persoon, Waalre, NL;

Inventors:

Martinus Petrus Maria Bierhoff, Deurne, NL;

Bart Buijsse, Eindhoven, NL;

Cornelis Sander Kooijman, Veldhoven, NL;

Hugo Van Leeuwen, Eindhoven, NL;

Hendrik Gezinus Tappel, Casteren, NL;

Colin August Sanford, Atkinson, NH (US);

Sander Richard Marie Stoks, Nijmegen, NL;

Steven Berger, Newburyport, MA (US);

Ben Jacobus Marie Bormans, Asten, NL;

Koen Arnoldus Wilhelmus Driessen, Valkenswaard, NL;

Johannes Antonius Hendricus W.G. Persoon, Waalre, NL;

Assignee:

FEI Company, Hillsboro, OR (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H04N 5/253 (2006.01); H01J 37/28 (2006.01); H01J 37/16 (2006.01); H01J 37/18 (2006.01); H01J 37/20 (2006.01); H01J 37/22 (2006.01); H01J 37/244 (2006.01);
U.S. Cl.
CPC ...
H01J 37/28 (2013.01); H01J 37/16 (2013.01); H01J 37/18 (2013.01); H01J 37/20 (2013.01); H01J 37/226 (2013.01); H01J 37/244 (2013.01); H01J 2237/1405 (2013.01); H01J 2237/162 (2013.01); H01J 2237/1825 (2013.01); H01J 2237/188 (2013.01); H01J 2237/2003 (2013.01); H01J 2237/2006 (2013.01);
Abstract

A user interface for operation of a scanning electron microscope device that combines lower magnification reference images and higher magnification images on the same screen to make it easier for a user who is not used to the high magnification of electron microscopes to readily determine where on the sample an image is being obtained and to understand the relationship between that image and the rest of the sample. Additionally, other screens, such as, for example, an archive screen and a settings screen allow the user to compare saved images and adjust the settings of the system, respectively.


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