The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 05, 2015

Filed:

Mar. 12, 2010
Applicants:

Magashi Nagamori, Fujimino, JP;

Yuji Hagiwara, Kawagoe, JP;

Takashi Masubuchi, Fujimino, JP;

Satoru Narizuka, Saitama, JP;

Inventors:

Magashi Nagamori, Fujimino, JP;

Yuji Hagiwara, Kawagoe, JP;

Takashi Masubuchi, Fujimino, JP;

Satoru Narizuka, Saitama, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C07C 309/00 (2006.01); C07C 313/04 (2006.01); C07C 303/32 (2006.01); C07C 381/12 (2006.01); G03F 7/004 (2006.01); G03F 7/039 (2006.01);
U.S. Cl.
CPC ...
C07C 313/04 (2013.01); C07C 303/32 (2013.01); C07C 381/12 (2013.01); G03F 7/0045 (2013.01); G03F 7/0046 (2013.01); G03F 7/0392 (2013.01);
Abstract

An ammonium hydroxyfluoroalkanesulfinate is obtained by using an organic base while sulfinating a bromofluoroalcohol with a sulfinating agent. An ammonium hydroxyfluoroalkanesulfonate is obtained by oxidizing the ammonium hydroxyfluoroalkanesulfinate. An onium fluoroalkanesulfonate is obtained by converting the ammonium hydroxyfluoroalkanesulfonate into an onium salt through esterification. This onium fluoroalkanesulfonate is useful as a photoacid generator in chemically amplified resists and the like.


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