The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 05, 2015
Filed:
Feb. 05, 2013
Applicant:
Tokyo Ohka Kogyo Co., Ltd., Kawasaki-shi, JP;
Inventors:
Atsushi Matsushita, Kawasaki, JP;
Tatsuhiro Mitake, Kawasaki, JP;
Assignee:
Tokyo Ohka Kogyo Co., Ltd, Kawasaki-shi, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B32B 38/00 (2006.01); H01L 21/268 (2006.01);
U.S. Cl.
CPC ...
B32B 38/0008 (2013.01); H01L 21/268 (2013.01); B32B 2310/14 (2013.01);
Abstract
A method of manufacturing a laminate including a substrate, a support, and a release layer, the method including a preliminary treatment process of increasing temperatures of the support carried into a reaction chamber and the inside of the reaction chamber by a plasma treatment, and a release layer forming process of supplying a source gas serving as the release layer into the reaction chamber after the preliminary treatment process to form the release layer on the support.