The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 05, 2015
Filed:
Jul. 27, 2012
Vivian W. Ryan, Berne, NY (US);
Holm Geisler, Dresden, DE;
Dirk Breuer, Dresden, DE;
GLOBALFOUNDRIES Inc., Grand Cayman, KY;
Abstract
Generally, the subject matter herein relates to detecting the presence of weak BEOL sites in a metallization system. One disclosed method includes performing a lateral force test on a pillar bump formed above a metallization system of a semiconductor chip, which includes contacting the pillar bump with a test probe while moving the test probe at a substantially constant speed that is less than approximately 1 μm/sec along a path that is oriented at a substantially non-zero angle relative to a plane of the metallization system. Furthermore, the test probe is moving substantially away from the metallization system so that a force imposed on the pillar bump by the test probe has an upward component that induces a tensile load on the metallization system. The disclosed method also includes determining a behavioral interaction between the pillar bump and the metallization system during the lateral force test.