The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 28, 2015

Filed:

Nov. 19, 2010
Applicants:

Kazufumi Sakai, Saga, JP;

Kazuhiro Nonaka, Saga, JP;

Shinsuke Yamaguchi, Kumamoto, JP;

Inventors:

Kazufumi Sakai, Saga, JP;

Kazuhiro Nonaka, Saga, JP;

Shinsuke Yamaguchi, Kumamoto, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01J 4/00 (2006.01); G01N 21/95 (2006.01); G01N 21/21 (2006.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
G01N 21/9505 (2013.01); G01N 21/21 (2013.01); H01L 22/12 (2013.01); H01L 2924/0002 (2013.01);
Abstract

Light from a light source device is polarized through a polarizer and is caused to impinge obliquely onto an object to be inspected. The resulting scattered light is received by a CCD imaging device having an element for separating scattered polarized light disposed in a dark field. Component light intensities are worked out for an obtained P-polarized component image and an obtained S-polarized component image and a polarization direction is determined as a ratio of them. The component light intensities and the polarization directions are determined from images obtained by imaging of the light scattering entities in a state where static stress is not applied to the object to the inspected and in a state where static load is applied thereto so as to generate tensional stress on the side irradiated by light. The component light intensities and the polarization directions are compared with predetermined threshold values.


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