The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 28, 2015
Filed:
Dec. 27, 2012
Applicant:
Intermolecular Inc., San Jose, CA (US);
Inventors:
Guowen Ding, San Jose, CA (US);
Brent Boyce, Novi, MI (US);
Mohd Fadzli Anwar Hassan, San Francisco, CA (US);
Minh Huu Le, San Jose, CA (US);
Zhi-Wen Wen Sun, Sunnyvale, CA (US);
Yu Wang, San Jose, CA (US);
Assignee:
Intermolecular, Inc., San Jose, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/41 (2006.01);
U.S. Cl.
CPC ...
G01N 21/4133 (2013.01);
Abstract
Methods are provided to use data obtained from a single wavelength ellipsometer to determine the refractive index of materials as a function of wavelength for thin conductive films. The methods may be used to calculate the refractive index spectrum as a function of wavelength for thin films of metals, and conductive materials such as conductive metal nitrides or conductive metal oxides.