The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 28, 2015
Filed:
Feb. 04, 2013
Applicant:
Jeol Ltd., Tokyo, JP;
Inventor:
Kazuya Omoto, Tokyo, JP;
Assignee:
JEOL Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 37/10 (2006.01); H01J 37/153 (2006.01); H01J 37/05 (2006.01); H01J 37/04 (2006.01); H01J 37/26 (2006.01);
U.S. Cl.
CPC ...
H01J 37/10 (2013.01); H01J 37/05 (2013.01); H01J 37/153 (2013.01); H01J 37/04 (2013.01); H01J 37/26 (2013.01); H01J 2237/0492 (2013.01); H01J 2237/057 (2013.01); H01J 2237/1532 (2013.01);
Abstract
A transmission electron microscope () includes an electron beam source (), an illumination lens (), an objective lens (), an intermediate lens system (), a pair of transfer lenses () located behind the intermediate lens system (), and an energy filter () for separating the electrons of the beam L transmitted through the specimen (S) according to energy. The transfer lenses () transfer the first image to the entrance crossover plane (S) of the energy filter () and to transfer the second image to the entrance image plane (A) of the filter (). An image plane (A) is formed between the first transfer lens () and the second transfer lens ().