The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 28, 2015

Filed:

May. 13, 2013
Applicant:

Shinko Electric Industries Co., Ltd., Nagano, JP;

Inventors:

Kotaro Kodani, Nagano, JP;

Junichi Nakamura, Nagano, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05K 1/16 (2006.01); H05K 1/18 (2006.01); H05K 1/11 (2006.01); H01L 21/48 (2006.01); H01L 21/683 (2006.01); H01L 23/498 (2006.01); H05K 3/40 (2006.01); H01L 21/56 (2006.01); H05K 3/20 (2006.01); H05K 3/46 (2006.01);
U.S. Cl.
CPC ...
H05K 1/116 (2013.01); Y10T 29/49155 (2015.01); Y10T 29/49165 (2015.01); Y10T 29/4913 (2015.01); H01L 21/4853 (2013.01); H01L 21/563 (2013.01); H01L 21/6835 (2013.01); H01L 23/49811 (2013.01); H01L 23/49827 (2013.01); H01L 2221/68359 (2013.01); H01L 2224/16225 (2013.01); H01L 2924/15174 (2013.01); H05K 1/113 (2013.01); H05K 3/205 (2013.01); H05K 3/4007 (2013.01); H05K 3/4682 (2013.01); H05K 2201/0367 (2013.01); H05K 2201/10674 (2013.01); H05K 2203/0376 (2013.01); H05K 1/181 (2013.01);
Abstract

A method of making a wiring substrate includes forming a first metal layer on a surface of a support member, the first metal layer having at least one columnar through hole that exposes the surface of the support member, forming a columnar metal layer that fills the columnar through hole, forming an insulating layer on the columnar metal layer and on the first metal layer, forming an interconnection layer on a first surface of the insulating layer such that the interconnection layer is electrically connected to the columnar metal layer through the insulating layer, and forming a protruding part including at least part of the columnar metal layer by removing at least the support member and the first metal layer, the protruding part protruding from a second surface of the insulating layer opposite the first surface and serving as at least part of a connection terminal of the wiring substrate.


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