The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 28, 2015

Filed:

Apr. 13, 2012
Applicants:

Hsuan-sheng Yang, Taichung, TW;

Wen-chin Lee, Hsinchu, TW;

Li-huan Chu, Hsin Chu, TW;

Inventors:

Hsuan-Sheng Yang, Taichung, TW;

Wen-Chin Lee, Hsinchu, TW;

Li-Huan Chu, Hsin Chu, TW;

Assignee:

TSMC Solar Ltd., Taichung, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 21/02 (2006.01); H01L 31/032 (2006.01); H01L 31/0749 (2012.01);
U.S. Cl.
CPC ...
H01L 21/02491 (2013.01); H01L 21/02568 (2013.01); H01L 21/02614 (2013.01); H01L 31/0322 (2013.01); H01L 31/0749 (2013.01); Y02E 10/541 (2013.01);
Abstract

A method for manufacturing a CIGS thin film photovoltaic device includes forming a back contact layer on a substrate, forming an Se-rich layer on the back contact layer, forming a precursor layer on the Se-rich layer by depositing copper, gallium and indium resulting in a first interim structure, annealing or selenizing the first interim structure, thereby forming Cu/Se, Ga/Se or CIGS compounds along the interface between the back contact layer and the precursor layer and resulting in a second interim structure, and selenizing the second interim structure, thereby converting the precursor layer into a CIGS absorber layer on the back contact layer.


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