The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 28, 2015
Filed:
Oct. 27, 2011
Applicants:
Yoshiyuki Utsumi, Kawasaki, JP;
Akiya Kawaue, Kawasaki, JP;
Yoshitaka Komuro, Kawasaki, JP;
Kenichiro Miyashita, Kawasaki, JP;
Inventors:
Yoshiyuki Utsumi, Kawasaki, JP;
Akiya Kawaue, Kawasaki, JP;
Yoshitaka Komuro, Kawasaki, JP;
Kenichiro Miyashita, Kawasaki, JP;
Assignee:
Tokyo Ohka Kogyo Co., Ltd., Kawasaki-shi, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); C07D 307/00 (2006.01); C07D 327/02 (2006.01); C07D 327/04 (2006.01); C07D 493/18 (2006.01); C07D 497/18 (2006.01); G03F 7/039 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0045 (2013.01); C07D 307/00 (2013.01); C07D 327/02 (2013.01); C07D 327/04 (2013.01); C07D 493/18 (2013.01); C07D 497/18 (2013.01); G03F 7/0046 (2013.01); G03F 7/0397 (2013.01); Y10S 430/115 (2013.01);
Abstract
A resist composition containing a base component (A) which exhibits changed solubility in a developing solution under the action of acid, and an acid generator component (B) which generates acid upon exposure, wherein the acid generator component (B) includes an acid generator (B1) having a group represented by general formula (b1-1) shown below in the cation moiety.