The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 28, 2015
Filed:
Mar. 25, 2013
Brad Lemon, Battle Creek, MI (US);
Joseph Hirt, Cypress, TX (US);
Timothy Welling, Portage, MI (US);
James G. Daily, Iii, Marshall, MI (US);
David Meendering, Coldwater, MI (US);
Gary Rozak, Akron, OH (US);
Jerome O'grady, Hudson Village, OH (US);
Prabhat Kumar, Framingham, MA (US);
Steven A. Miller, Canton, MA (US);
Rong-chein Richard Wu, North Chelmsford, MA (US);
David G. Schwartz, Mentor, OH (US);
Brad Lemon, Battle Creek, MI (US);
Joseph Hirt, Cypress, TX (US);
Timothy Welling, Portage, MI (US);
James G. Daily, III, Marshall, MI (US);
David Meendering, Coldwater, MI (US);
Gary Rozak, Akron, OH (US);
Jerome O'Grady, Hudson Village, OH (US);
Prabhat Kumar, Framingham, MA (US);
Steven A. Miller, Canton, MA (US);
Rong-chein Richard Wu, North Chelmsford, MA (US);
David G. Schwartz, Mentor, OH (US);
H.C. Starck Inc., Newton, MA (US);
Abstract
In various embodiments, planar sputtering targets are produced by forming a billet at least by pressing molybdenum powder in a mold and sintering the pressed powder, working the billet to form a worked billet, heat treating the worked billet, working the worked billet to form a final billet, and heat treating the final billet.