The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 21, 2015
Filed:
May. 18, 2011
Pai-hsueh Yang, Palo Alto, CA (US);
Scott Coakley, Belmont, CA (US);
Michael B. Binnard, Belmont, CA (US);
Kazuhiro Hirano, Ageo, JP;
Bausan Yuan, San Jose, CA (US);
Shiang-lung Koo, Fremont, CA (US);
Pai-Hsueh Yang, Palo Alto, CA (US);
Scott Coakley, Belmont, CA (US);
Michael B. Binnard, Belmont, CA (US);
Kazuhiro Hirano, Ageo, JP;
Bausan Yuan, San Jose, CA (US);
Shiang-Lung Koo, Fremont, CA (US);
Nikon Corporation, Tokyo, JP;
Abstract
A method for determining a commutation offset for a mover (A) of a mover assembly (C) that moves and positions a stage (A) relative to a stage base (B) includes controlling the mover assembly (C) in a closed loop fashion to maintain the position of the stage (A) along a first axis and along a second axis with the stage (A) levitated above the stage base (B). The method also includes the steps of (i) directing current to a coil array () of the mover assembly (C) so that the mover assembly (C) imparts a disturbance on the stage (A); and (ii) evaluating one or more forces generated by the mover assembly (C) as a result of the disturbance on the stage (A) created by the mover (A). Further, a method for generating a compensation map () includes sequentially directing a plurality of excitation signals to the control of the mover assembly (C) and determining the control commands that result from the plurality of excitation signals.