The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 21, 2015
Filed:
Oct. 11, 2011
Shengwu Chang, South Hamilton, MA (US);
Joseph C. Olson, Beverly, MA (US);
Frank Sinclair, Quincy, MA (US);
Matthew P. Mcclellan, Lancaster, MA (US);
Antonella Cucchetti, Manchester by the Sea, MA (US);
Shengwu Chang, South Hamilton, MA (US);
Joseph C. Olson, Beverly, MA (US);
Frank Sinclair, Quincy, MA (US);
Matthew P. McClellan, Lancaster, MA (US);
Antonella Cucchetti, Manchester by the Sea, MA (US);
Varian Semiconductor Equipment Associates, Inc., Gloucester, MA (US);
Abstract
A system and method for maintain a desired degree of platen flatness is disclosed. A laser system is used to measure the flatness of a platen. The temperature of the platen is then varied to achieve the desired level of flatness. In some embodiments, this laser system is only used during a set up period and the resulting desired temperature is then used during normal operation. In other embodiments, a laser system is used to measure the flatness of the platen, even while the workpiece is being processed.