The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 21, 2015
Filed:
Sep. 21, 2012
Applicants:
Jerome A. Imonigie, Boise, ID (US);
Prashant Raghu, Boise, ID (US);
Inventors:
Jerome A. Imonigie, Boise, ID (US);
Prashant Raghu, Boise, ID (US);
Assignee:
Micron Technology, Inc., Boise, ID (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/336 (2006.01); C09K 13/08 (2006.01); H01L 21/28 (2006.01); H01L 21/3213 (2006.01); H01L 27/115 (2006.01);
U.S. Cl.
CPC ...
C09K 13/08 (2013.01); H01L 21/28273 (2013.01); H01L 21/32134 (2013.01); H01L 27/11556 (2013.01);
Abstract
Methods and compositions for etching polysilicon including aqueous compositions containing nitric acid and ammonium fluoride, and apparatus formed thereby.