The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 21, 2015
Filed:
Feb. 07, 2012
Applicants:
Nianci Han, San Jose, CA (US);
LI Xu, San Jose, CA (US);
Hong Shih, Walnut, CA (US);
Inventors:
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C23C 4/10 (2006.01); B05C 11/00 (2006.01); B32B 15/04 (2006.01); B32B 15/20 (2006.01); C25D 3/54 (2006.01); C23C 16/44 (2006.01); C23C 30/00 (2006.01); C25D 5/50 (2006.01); H01J 37/32 (2006.01); H01L 21/67 (2006.01); C23C 28/00 (2006.01); C25D 3/44 (2006.01); C25D 3/56 (2006.01); C25D 5/18 (2006.01);
U.S. Cl.
CPC ...
C25D 3/54 (2013.01); C23C 16/4411 (2013.01); C23C 30/00 (2013.01); C23C 30/005 (2013.01); Y10T 428/12736 (2015.01); Y10T 428/12618 (2015.01); Y10T 428/12778 (2015.01); Y10T 428/12611 (2015.01); Y10T 428/12458 (2015.01); Y10T 428/12806 (2015.01); C23C 16/4404 (2013.01); C25D 3/44 (2013.01); C25D 3/56 (2013.01); C25D 5/18 (2013.01); C25D 5/50 (2013.01); H01J 37/32477 (2013.01); H01L 21/67115 (2013.01); C23C 28/321 (2013.01); C23C 28/322 (2013.01); C23C 28/3455 (2013.01); C23C 28/36 (2013.01); C23C 28/42 (2013.01); C23C 28/34 (2013.01); C23C 28/345 (2013.01);
Abstract
A substrate processing chamber component comprising a chamber component structure having an yttrium-aluminum coating. The yttrium-aluminum coating comprises a compositional gradient through a thickness of the coating.