The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 21, 2015

Filed:

May. 26, 2011
Applicants:

Futoshi Shimai, Kawasaki, JP;

Akihiko Sato, Kawasaki, JP;

Tsutomu Sahoda, Kawasaki, JP;

Kenji Maruyama, Kawasaki, JP;

Inventors:

Futoshi Shimai, Kawasaki, JP;

Akihiko Sato, Kawasaki, JP;

Tsutomu Sahoda, Kawasaki, JP;

Kenji Maruyama, Kawasaki, JP;

Assignee:

Tokyo Ohka Kogyo Co., Ltd., Kawasaki-shi, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B05C 5/00 (2006.01); B05D 3/00 (2006.01); H01L 21/67 (2006.01); H01L 21/677 (2006.01); B05C 5/02 (2006.01); B05C 9/04 (2006.01); B05B 13/02 (2006.01); B05D 1/00 (2006.01); B05D 1/26 (2006.01); G11B 5/842 (2006.01);
U.S. Cl.
CPC ...
B05C 5/02 (2013.01); B05C 9/04 (2013.01); B05D 3/007 (2013.01); H01L 21/67155 (2013.01); B05B 13/0228 (2013.01); B05B 13/02 (2013.01); H01L 21/67051 (2013.01); B05B 13/0278 (2013.01); B05D 1/002 (2013.01); B05D 1/26 (2013.01); G11B 5/842 (2013.01);
Abstract

Provided is a coating device including: a substrate carrying unit which rotatably holds a substrate while the substrate is upright and is able to dispose the held substrate at a first position and a second position; an application unit which includes a liquid material nozzle ejecting a liquid material to each of first and second surfaces of the substrate disposed at the first position; and a removal unit which includes an accommodation mechanism accommodating a part of the peripheral edge portion of the substrate disposed at the second position and a cleaning liquid ejection mechanism ejecting a cleaning liquid to the peripheral edge portion and removes the liquid material of the peripheral edge portion.


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