The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 14, 2015

Filed:

Apr. 08, 2013
Applicant:

Nanogram Corporation, Milpitas, CA (US);

Inventors:

Shivkumar Chiruvolu, San Jose, CA (US);

Igor Altman, Fremont, CA (US);

Bernard M. Frey, Livermore, CA (US);

Weidong Li, San Jose, CA (US);

Guojun Liu, San Jose, CA (US);

Robert B. Lynch, Livermore, CA (US);

Gina Elizabeth Pengra-Leung, San Jose, CA (US);

Uma Srinivasan, Mountain View, CA (US);

Assignee:

NanoGram Corporation, Milpitas, CA (US);

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 51/00 (2006.01); C09D 5/24 (2006.01); B01J 19/12 (2006.01); B82Y 30/00 (2011.01); C09D 7/12 (2006.01); C09D 7/14 (2006.01); C09D 11/101 (2014.01); C09D 11/52 (2014.01); H01L 21/02 (2006.01); H01L 31/0236 (2006.01); H01L 31/0368 (2006.01); H01L 31/0376 (2006.01); H01L 31/0747 (2012.01); H01L 31/18 (2006.01); H01L 31/00 (2006.01); H01L 23/482 (2006.01); H01L 23/532 (2006.01); C08K 3/08 (2006.01); C08K 3/36 (2006.01); C08K 9/02 (2006.01);
U.S. Cl.
CPC ...
C09D 5/24 (2013.01); H01L 23/4828 (2013.01); H01L 23/53276 (2013.01); B01J 19/121 (2013.01); B01J 2219/0869 (2013.01); B01J 2219/0871 (2013.01); B01J 2219/0875 (2013.01); B82Y 30/00 (2013.01); C08K 3/08 (2013.01); C08K 3/36 (2013.01); C08K 9/02 (2013.01); C09D 7/1266 (2013.01); C09D 7/1275 (2013.01); C09D 7/14 (2013.01); C09D 11/101 (2013.01); C09D 11/52 (2013.01); H01L 21/02532 (2013.01); H01L 21/02573 (2013.01); H01L 21/02579 (2013.01); H01L 21/02581 (2013.01); H01L 21/02601 (2013.01); H01L 21/02628 (2013.01); Y02E 10/52 (2013.01); H01L 31/02363 (2013.01); H01L 31/03682 (2013.01); H01L 31/03762 (2013.01); H01L 31/0747 (2013.01); H01L 31/182 (2013.01); H01L 31/1864 (2013.01); H01L 31/00 (2013.01);
Abstract

Laser pyrolysis reactor designs and corresponding reactant inlet nozzles are described to provide desirable particle quenching that is particularly suitable for the synthesis of elemental silicon particles. In particular, the nozzles can have a design to encourage nucleation and quenching with inert gas based on a significant flow of inert gas surrounding the reactant precursor flow and with a large inert entrainment flow effectively surrounding the reactant precursor and quench gas flows. Improved silicon nanoparticle inks are described that has silicon nanoparticles without any surface modification with organic compounds. The silicon ink properties can be engineered for particular printing applications, such as inkjet printing, gravure printing or screen printing. Appropriate processing methods are described to provide flexibility for ink designs without surface modifying the silicon nanoparticles.


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