The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 14, 2015

Filed:

Jun. 10, 2013
Applicants:

Imec, Leuven, BE;

Globalfoundries Inc., Grand Cayman, KY (US);

Inventors:

Geert Eneman, Balen, BE;

David Brunco, Hillsboro, CA (US);

Geert Hellings, Heverlee, BE;

Assignees:

IMEC, Leuven, BE;

GLOBALFOUNDRIES Inc., Grand Cayman, KY;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/06 (2006.01); H01L 29/78 (2006.01); H01L 29/775 (2006.01); H01L 29/778 (2006.01); H01L 29/161 (2006.01); H01L 29/165 (2006.01); H01L 29/10 (2006.01); B82Y 10/00 (2011.01);
U.S. Cl.
CPC ...
H01L 29/785 (2013.01); H01L 29/775 (2013.01); H01L 29/7781 (2013.01); H01L 29/161 (2013.01); H01L 29/165 (2013.01); H01L 29/1054 (2013.01); B82Y 10/00 (2013.01);
Abstract

The disclosed technology relates to transistors having a strained quantum well for carrier confinement, and a method for manufacturing thereof. In one aspect, a FinFET or a planar FET device comprises a semiconductor substrate, a strain-relaxed buffer layer comprising Ge formed on the semiconductor substrate, a channel layer formed on the strain-relaxed buffer layer, and a strained quantum barrier layer comprising SiGe interposed between and in contact with the strain-relaxed buffer layer and the channel layer. The compositions of the strain-relaxed buffer layer, the strained quantum barrier layer and the channel layer are chosen such that a band offset of the channel layer and a band offset of the strained quantum barrier layer have opposite signs with respect to the strain-relaxed buffer layer.


Find Patent Forward Citations

Loading…