Electron microscope

Abstract

Provided is an electron microscope capable of enhancing a magnetic shield function even though the structure thereof has an objective tens that projects into a sample chamber space. The electron microscope includes: an objective lens () which focuses an electron beam to irradiate a sample () with; a sample chamber () which forms a sample space to contain the sample (); a sample chamber magnetic shield () provided inside the sample chamber (); and an objective lens magnetic shield () of a tubular shape which surrounds the periphery of the objective lens (). A first and a second hole, which face to each other in a traveling direction of the electron beam, are provided in an upper plate () serving as an upper wall of the sample chamber () and in an upper shield () of the sample chamber magnetic shield (). The objective lens () is held inside the first hole provided in the upper plate (). A lower end of the objective lens () is disposed at a position lower than a lower end of the upper plate (), and at a position of the second hole provided in the upper shield () or at a position near this position. The objective lens magnetic shield () is positioned inside the first hole, and a lower end thereof is connected to the upper shield ().