The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 14, 2015

Filed:

Jul. 04, 2011
Applicants:

Shigeyoshi Netsu, Niigata, JP;

Fumitaka Kume, Niigata, JP;

Junichi Okada, Niigata, JP;

Inventors:

Shigeyoshi Netsu, Niigata, JP;

Fumitaka Kume, Niigata, JP;

Junichi Okada, Niigata, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 21/66 (2006.01); G01R 31/26 (2014.01); C01B 33/035 (2006.01); G01N 29/04 (2006.01); G01N 29/44 (2006.01); G01N 29/46 (2006.01); G01N 29/12 (2006.01);
U.S. Cl.
CPC ...
H01L 22/12 (2013.01); C01B 33/035 (2013.01); G01N 29/045 (2013.01); G01N 29/4454 (2013.01); G01N 29/46 (2013.01); G01N 2291/0234 (2013.01); G01N 29/12 (2013.01); G01N 2291/2626 (2013.01); H01L 2924/0002 (2013.01); H01L 2224/16 (2013.01);
Abstract

The length of the polycrystalline silicon rod () is measured with a tape measure, then the polycrystalline silicon rod () is hit with a hammer (), and this hammering sound is recorded in a recorder () through a microphone (). Then, an acoustic signal of the hammering sound is subjected to a fast Fourier transform and a frequency distribution is displayed. Furthermore, a peak frequency f is detected which shows the largest sound volume in the frequency distribution obtained after the fast Fourier transform. The relationship between the length (L) of the polycrystalline silicon rod and the peak frequency f is obtained, and the firmness of the polycrystalline silicon rod is determined on the basis of whether or not the peak frequency f is in a range of f≧1,471/L (region A).


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