The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 14, 2015
Filed:
Jul. 27, 2011
Applicants:
Wilfried Von Ammon, Hochburg, AT;
Gudrun Kissinger, Lebus, DE;
Dawid Kot, Kunice, PL;
Inventors:
Assignee:
Siltronic AG, Munich, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C01B 33/02 (2006.01); F24J 3/00 (2006.01); C30B 33/02 (2006.01); C30B 29/06 (2006.01); H01L 21/322 (2006.01);
U.S. Cl.
CPC ...
H01L 21/3225 (2013.01); C30B 29/06 (2013.01); C30B 33/02 (2013.01);
Abstract
Silicon wafers having an oxygen concentration of 5·10to 7.5·10cmhave the following BMD densities after the following thermal processes, carried out alternatively: