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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9005472 B1

PDFFull Text
Date of Patent:
Apr. 14, 2015

Filed:

Jan. 19, 2011

Aqueous polishing agent and graft copolymers and their use in a process for polishing patterned and unstructured metal surfaces

Applicants:

Vijay Immanuel Raman, Mannheim, DE;

Ilshat Gubaydullin, Ludwigshafen, DE;

Mario Brands, Ludwigshafen, DE;

Yuzhuo LI, Heidelberg, DE;

Maxim Peretolchin, Mannheim, DE;

Inventors:

Vijay Immanuel Raman, Mannheim, DE;

Ilshat Gubaydullin, Ludwigshafen, DE;

Mario Brands, Ludwigshafen, DE;

Yuzhuo Li, Heidelberg, DE;

Maxim Peretolchin, Mannheim, DE;

Assignee:

BASF SE, Ludwigshafen, DE;

Attorney:

Oblon, McClelland, Maier & Neustadt, L.L.P.

Primary Examiner:

Nadine Norton

Assistant Examiner:

Stephanie Duclair

Int. Cl.
CPC ...
H01L 21/302 (2006.01); H01L 21/461 (2006.01); C03C 15/00 (2006.01); C03C 25/68 (2006.01); C09K 13/00 (2006.01); C09K 13/04 (2006.01); C09K 13/08 (2006.01); C09K 13/06 (2006.01); C09G 1/02 (2006.01); C09K 3/14 (2006.01); C08F 283/00 (2006.01);
U.S. Cl.
CPC ...
C09G 1/02 (2013.01); C09K 3/1463 (2013.01); C08F 283/00 (2013.01);
Abstract

An aqueous polishing agent, comprising, as the abrasive, at least one kind of polymer particles (A) finely dispersed in the aqueous phase and having at their surface a plurality of at least one kind of functional groups (a1) capable of interacting with the metals and/or the metal oxides on top of the surfaces to be polished and forming complexes with the said metals and metal cations, the said polymer particles (A) being preparable by the emulsion or suspension polymerization of at least one monomer containing at least one radically polymerizable double bond in the presence of at least one oligomer or polymer containing a plurality of functional groups (a1); graft copolymers preparable by the emulsion or suspension polymerization of at least one monomer containing at least one radically polymerizable double bond in the presence of at least one oligomeric or polymeric aminotriazine-polyamine condensate; and a process for the chemical and mechanical polishing of patterned and unstructured metal surfaces making use of the said aqueous polishing agent.

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