The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 14, 2015
Filed:
Dec. 03, 2010
Applicant:
Antonius Johannus Van Der Net, Tilburg, NL;
Inventor:
Antonius Johannus Van Der Net, Tilburg, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01F 3/04 (2006.01); G03F 7/20 (2006.01); C10J 1/06 (2006.01); C10J 1/10 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70933 (2013.01); C10J 1/06 (2013.01); C10J 1/10 (2013.01); G03F 7/70341 (2013.01); Y10S 261/65 (2013.01);
Abstract
A humidifying apparatus is disclosed in which gas is provided to a first side of a membrane and liquid to a second side of the same membrane. The membrane is non-porous to the liquid but porous to vapor of the liquid and is liquidphilic to said liquid.