The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 07, 2015

Filed:

Aug. 06, 2012
Applicants:

Guillaume Celi, Grenoble, FR;

Thierry Parrassin, Grenoble, FR;

Sylvain Dudit, Meylan, FR;

Inventors:

Guillaume Celi, Grenoble, FR;

Thierry Parrassin, Grenoble, FR;

Sylvain Dudit, Meylan, FR;

Assignee:

STMicroelectronics SA, Montrouge, FR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 31/308 (2006.01); G01R 31/311 (2006.01); G01N 21/17 (2006.01); G01N 21/55 (2014.01);
U.S. Cl.
CPC ...
G01R 31/311 (2013.01); G01N 21/1717 (2013.01); G01N 21/55 (2013.01); G01N 2021/1731 (2013.01); G01N 2021/1753 (2013.01); G01N 2021/1765 (2013.01);
Abstract

A method can be used for detecting defects in an electronic integrated circuit that includes a power input and a data input. The electronic integrated circuit is powered with a periodic power signal having a frequency and an input signal is applied to the data input. A surface of the electronic integrated circuit is swept with a laser beam. A first image is generated using a laser beam reflected from the surface and a second image is generated using a selected part of the laser beam reflected from the surface. The selected part of the reflected laser beam has a frequency that corresponds to the frequency of the power signal. Defects in the integrated circuit can be detected by superposing the first image and the second image.


Find Patent Forward Citations

Loading…