The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 07, 2015
Filed:
Apr. 14, 2006
Michael L'bassi, Sterling, MA (US);
Junhua Ding, Tewksbury, MA (US);
David D'entremont, Stoneham, MA (US);
Michael L'Bassi, Sterling, MA (US);
Junhua Ding, Tewksbury, MA (US);
David D'Entremont, Stoneham, MA (US);
MKS Instruments, Inc., Andover, MA (US);
Abstract
A system for dividing a single mass flow into a plurality N of secondary flows includes an inlet configured to receive the single mass flow, a master FRC (flow ratio controller), and one or more slave FRCs. Each FRC is connected to the inlet and including at least one flow channel. The master FRC and the slave FRCs include in combination a total of N flow channels. Each flow channel i (i=1, . . . , N) is connected to carry a corresponding one of the N secondary flows. In response to preselected ratio setpoints received from a host controller, the master FRC and the slave FRCs maintain ratios Q/Q(i=1, . . . , N) between individual flow rates Q(i=1, . . . , N) and a total flow rate Qat the preselected ratio set points.