The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 31, 2015
Filed:
Aug. 10, 2005
Hiroyuki Suzuki, Tokyo, JP;
Shinichi Okita, Tokyo, JP;
Tadashi Yamaguchi, Yokohama, JP;
Nikon Corporation, Tokyo, JP;
Nikon Systems Inc., Tokyo, JP;
Abstract
[PROBLEM] To enable confirmation of whether a substrate processing system is being illicitly used and preventing that use when there is the fact of illicit use. [MEANS FOR SOLUTION] A license file LF is a file encrypting license information L including usage terms of a substrate processing system for a specific user. A match confirmation program Pconfirms the match between the content of the license file LF decrypted by a decryption program Pand device information DI, network information NI, and current time CT obtained from the substrate processing system to confirm the existence of the fact of illicit use. If there is illicit use, the control program Pstops operation of the substrate processing system until predetermined action is taken based on the information from the match confirmation program P