The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 31, 2015
Filed:
Sep. 06, 2011
Applicants:
Paul Doyle, San Jose, CA (US);
Alexander Belyaev, Campbell, CA (US);
Inventors:
Paul Doyle, San Jose, CA (US);
Alexander Belyaev, Campbell, CA (US);
Assignee:
KLA-Tencor Corporation, Milpitas, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 7/00 (2006.01); G01N 21/95 (2006.01);
U.S. Cl.
CPC ...
G02B 7/008 (2013.01); G01N 21/9501 (2013.01); G01N 2201/021 (2013.01);
Abstract
Disclosed herein is an apparatus for providing passive correction for thermal effects on a mounted mechanical component. Further disclosed is a wafer inspection system employing the passive thermal effect correction apparatus.