The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 31, 2015
Filed:
Oct. 02, 2008
Hans Butler, Best, NL;
Marc Wilhelmus Maria Van Der Wijst, Veldhoven, NL;
Cornelius Adrianus Lambertus DE Hoon, Best, NL;
Hans Butler, Best, NL;
Marc Wilhelmus Maria Van Der Wijst, Veldhoven, NL;
Cornelius Adrianus Lambertus De Hoon, Best, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A control system for controlling a position or position related quantity of an object is provided. A measurement system is configured to measure a position or position related quantity of the object. A controller is configured to provide a control signal on the basis of the measured position or position related quantity. A actuator actuates the object on the basis of the control signal. A filter unit, which may be a partial order filter unit, filters the measured position or position related quantity.