The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 31, 2015
Filed:
Oct. 20, 2011
John Notte, Iv, Gloucester, MA (US);
Randall G. Percival, Raymond, NH (US);
Milton Rahman, Peabody, MA (US);
Louise Barriss, North Reading, MA (US);
Russell Mello, Wakefield, MA (US);
Mark D. Dimanna, Fremont, NH (US);
John Notte, IV, Gloucester, MA (US);
Randall G. Percival, Raymond, NH (US);
Milton Rahman, Peabody, MA (US);
Louise Barriss, North Reading, MA (US);
Russell Mello, Wakefield, MA (US);
Mark D. DiManna, Fremont, NH (US);
Carl Zeiss Microscopy, LLC, Thornwood, NY (US);
Abstract
Systems and methods for heating an apex of a tip of a charged particle source are disclosed. The charged particle source can be, for example, a gas ion source. The systems can include a detector configured to detect light generated by the tip apex, and a controller coupled with the charged particle source and the detector so that the controller can control heating of the tip apex based on the light detected by the detector.