The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 31, 2015
Filed:
Dec. 02, 2011
Yasuyoshi Miyaji, Kyoto, JP;
Noriyuki Hayashi, Kyoto, JP;
Takamitsu Inahara, Kyoto, JP;
Takao Yonehara, Sunnyvale, CA (US);
Karl-josef Kramer, San Jose, CA (US);
Subramanian Tamilmani, Milpitas, CA (US);
Yasuyoshi Miyaji, Kyoto, JP;
Noriyuki Hayashi, Kyoto, JP;
Takamitsu Inahara, Kyoto, JP;
Takao Yonehara, Sunnyvale, CA (US);
Karl-Josef Kramer, San Jose, CA (US);
Subramanian Tamilmani, Milpitas, CA (US);
Dainippon Screen Mfg. Co., Ltd., , JP;
Solexel, Inc., Milpitas, CA (US);
Abstract
An apparatus for anodizing substrates immersed in an electrolyte solution. A substrate holder mounted in a storage tank includes a first support unit having first support elements for supporting, in a liquid-tight condition, only lower circumferential portions of the substrates, and a second support unit attachable to and detachable from the first support unit and having second support elements for supporting, in a liquid-tight condition, remaining circumferential portions of the substrates. A drive mechanism separates the first support unit and the second support unit when loading and unloading the substrates, and for connecting the first support unit and the second support unit after the substrates are placed in the substrate holder.