The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 31, 2015
Filed:
Feb. 22, 2010
Applicant:
Hendrik Jan DE Jong, The Hague, NL;
Inventor:
Hendrik Jan De Jong, The Hague, NL;
Assignee:
Mapper Lithography IP B.V., Delft, NL;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B05C 13/00 (2006.01); G03B 27/42 (2006.01); H01L 21/67 (2006.01); B82Y 10/00 (2011.01); B82Y 40/00 (2011.01); G03B 27/58 (2006.01); G03F 7/20 (2006.01); H01J 37/20 (2006.01); H01J 37/317 (2006.01); H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67 (2013.01); B82Y 10/00 (2013.01); B82Y 40/00 (2013.01); G03B 27/58 (2013.01); G03F 7/707 (2013.01); H01J 37/20 (2013.01); H01J 37/3174 (2013.01); H01L 21/00 (2013.01); H01J 2237/006 (2013.01); H01J 2237/2005 (2013.01); H01J 2237/2007 (2013.01);
Abstract
A substrate support structure for clamping a substrate by means of a capillary force created by a liquid clamping layer having a lower pressure than its surroundings. The substrate support structure comprises a surface provided with a plurality of substrate supporting elements for holding the substrate, and the surface further comprises portions with different capillary potential for inducing, during clamping, a predetermined capillary flow within the liquid clamping layer.