The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 24, 2015

Filed:

May. 03, 2013
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Michael S. Gordon, Yorktown Heights, NY (US);

Christopher V. Jahnes, Upper Saddle River, NJ (US);

Eric A. Joseph, White Plains, NY (US);

Hiroyuki Miyazoe, White Plains, NY (US);

Kenneth P. Rodbell, Sandy Hook, CT (US);

Arun Sharma, New Rochelle, NY (US);

Sri M. Sri-Jayantha, Ossining, NY (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 31/18 (2006.01); G01T 1/04 (2006.01);
U.S. Cl.
CPC ...
H01L 31/18 (2013.01); G01T 1/04 (2013.01);
Abstract

A method for a constructing radiation detector includes fabricating a multi-layer structure upon a wafer, the multi-layer structure comprising a plurality of metal layers, a plurality of sacrificial layers, and a plurality of insulating layers, forming a cavity within the multi-layer structure, filling the cavity with a gas that ionizes in response to nuclear radiation, and sealing the gas within the cavity.


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