The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 17, 2015

Filed:

Apr. 04, 2013
Applicants:

Japan Atomic Energy Agency, Ibaraki, JP;

Jeol Ltd., Tokyo, JP;

Shimadzu Corporation, Kyoto, JP;

Tohoku University, Miyagi, JP;

Inventors:

Takashi Imazono, Kyoto, JP;

Masato Koike, Kyoto, JP;

Hideyuki Takahashi, Tokyo, JP;

Hiroyuki Sasai, Kyoto, JP;

Masami Terauchi, Miyagi, JP;

Assignees:

Japan Atomic Energy Agency, Ibaraki, JP;

Jeol Ltd., Tokyo, JP;

Shimadzu Corporation, Kyoto, JP;

Tohoku University, Miyagi, JP;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G21K 1/06 (2006.01); G01N 23/20 (2006.01);
U.S. Cl.
CPC ...
G21K 1/06 (2013.01); G01N 23/20 (2013.01); G21K 1/062 (2013.01);
Abstract

To cover a wide wavelength bandwidth, a spectroscopic apparatus uses three varied line spacing concave diffraction gratings Gto G, the corresponding energy ranges for G, G, and Gbeing 50 to 200, 155 to 350, and 300 to 2200 eV, respectively. In the respective wavelength ranges, the diffraction conditions are satisfied. To provide a high throughput and a high resolution in the respective wavelength regions, the incident angles αto αfor Gto Gmeasured from the normal line of the diffraction grating are specified to be α<α<α. Presupposing the normal lines of all diffraction gratings are superposed upon a common normal line, in order to meet α<α<α, the center positions Δto Δfor Gto Gare set on the normal line (as Δ<Δ<Δ). From Gto G, one diffraction grating can be selected.


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