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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8982320 B1

PDFFull Text
Date of Patent:
Mar. 17, 2015

Filed:

Aug. 19, 2005

Alignment information display method and its program, alignment method, exposure method, device production process, display system, display device, and program and measurement/inspection system

Applicant:

Shinichi Okita, Tokyo, JP;

Inventor:

Shinichi Okita, Tokyo, JP;

Assignee:

Nikon Corporation, Tokyo, JP;

Attorney:

Oliff PLC

Primary Examiner:

Christina Riddle

Int. Cl.
CPC ...
G03B 27/42 (2006.01); G03B 27/32 (2006.01); H01L 21/68 (2006.01); G03F 7/20 (2006.01); G03F 9/00 (2006.01); G03B 27/58 (2006.01);
U.S. Cl.
CPC ...
H01L 21/682 (2013.01); G03F 7/70633 (2013.01); G03F 9/7003 (2013.01); G03F 9/7046 (2013.01); G03F 9/7092 (2013.01);
Abstract

An information display method that enables for efficient analysis and evaluation of alignment results and thereby facilitating the setting of effective alignment conditions or parameters. The alignment information display method receives as input the data of the results of processing relating to alignment measurement, receives as input information relating to the parameters of the alignment measurement, finds the information for display from the data of the results of processing based on the input parameters, and displays the found desired information for display by a display mode by which the effects on the alignment measurement become clear. Therefore, in setting the desired conditions, it is possible to easily confirm the results of analysis by the set conditions, that is, the effects of the set conditions. Therefore, a user can easily detect the optimum alignment conditions and parameters.

Find Patent Forward Citations

Okita, Shinichi. (2015). Alignment information display method and its program, alignment method, exposure method, device production process, display system, display device, and program and measurement/inspection system (U.S. Patent No. 8982320). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8982320

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