The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 17, 2015
Filed:
Apr. 24, 2012
Anjam Khursheed, Singapore, SG;
Hung Quang Hoang, Esch-sur-Alzette, LU;
Anjam Khursheed, Singapore, SG;
Hung Quang Hoang, Esch-sur-Alzette, LU;
National University of Singapore, Singapore, SG;
Abstract
A parallel radial mirror analyzer (PRMA) () for facilitating rotationally symmetric detection of charged particles caused by a charged beam incident on a specimen is disclosed. The PRMA comprises a zero-volt equipotential grid (), and a plurality of electrodes () electrically configured to generate corresponding electrostatic fields for deflecting the charged particles in accordance with respective energy levels of the charged particles to exit through the grid () to form corresponding second-order focal points on a detector (). The detector () is disposed external to the corresponding electrostatic fields. A related method is also disclosed.