The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 10, 2015

Filed:

Apr. 21, 2010
Applicants:

Wei-cheng Wang, Jongli, TW;

Feng-ning Lee, Taoyuan County, TW;

Inventors:

Wei-Cheng Wang, Jongli, TW;

Feng-Ning Lee, Taoyuan County, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06F 7/00 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67733 (2013.01);
Abstract

A system for managing semiconductor production includes a conveyor to convey a wafer carrier to or from an overhead hoist transfer system. The system also includes a cross-system transport apparatus to transfer the wafer carrier between the conveyor and an overhead shuttle system.


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