The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 10, 2015
Filed:
Oct. 25, 2010
Martinus Wilhelmus Van Den Heuvel, Best, NL;
Johannes Christiaan Leonardus Franken, Knegsel, NL;
Josephus Cornelius Johannes Antonius Vugts, Goirle, NL;
Martinus Wilhelmus Van Den Heuvel, Best, NL;
Johannes Christiaan Leonardus Franken, Knegsel, NL;
Josephus Cornelius Johannes Antonius Vugts, Goirle, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A conduit system for a lithographic apparatus is disclosed, the conduit system including a conduit configured to guide a liquid or liquid-gas mixture, and a gas injection nozzle configured to introduce a gas in the liquid or liquid-gas mixture to at least partially absorb pressure peaks or waves in the liquid or liquid-gas mixture. In an embodiment, the gas injection nozzle may be arranged in a pump of the conduit system. The pump further includes a pump inlet, a pump outlet and a pump chamber between the pump inlet and the pump outlet arranged for compression of the liquid or liquid-gas mixture.