The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 10, 2015
Filed:
Sep. 14, 2012
Kenneth A. Costello, Union City, CA (US);
Edward Yin, Cupertino, CA (US);
Michael Wayne Pelczynski, Hayward, CA (US);
Verle W. Aebi, Menlo Park, CA (US);
Kenneth A. Costello, Union City, CA (US);
Edward Yin, Cupertino, CA (US);
Michael Wayne Pelczynski, Hayward, CA (US);
Verle W. Aebi, Menlo Park, CA (US);
Intevac, Inc., Santa Clara, CA (US);
Abstract
A structure and method of manufacture is disclosed for a backside thinned imager that incorporates a conformal, AlO, low thermal budget, surface passivation. This passivation approach facilitates fabrication of backside thinned, backside illuminated, silicon image sensors with thick silicon absorber layer patterned with vertical trenches that are formed by etching the exposed back surface of a backside-thinned image sensor to control photo-carrier diffusion and optical crosstalk. A method of manufacture employing conformal, AlO, surface passivation approach is shown to provide high quantum efficiency and low dark current while meeting the thermal budget constraints of a finished standard foundry-produced CMOS imager.