The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 10, 2015
Filed:
Mar. 24, 2009
Applicants:
Daniel O. Clark, Pleasanton, CA (US);
Phil Chandler, San Francisco, CA (US);
Jay J. Jung, Sunnyvale, CA (US);
Inventors:
Daniel O. Clark, Pleasanton, CA (US);
Phil Chandler, San Francisco, CA (US);
Jay J. Jung, Sunnyvale, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 5/00 (2006.01); C23C 16/44 (2006.01); C23C 14/56 (2006.01);
U.S. Cl.
CPC ...
C23C 16/4412 (2013.01); C23C 14/56 (2013.01);
Abstract
A method for operating an electronic device manufacturing system is provided, including: introducing an inert gas into a process tool vacuum pump at a first flow rate while the process tool is operating in a process mode; and introducing the inert gas into the process tool vacuum pump at a second flow rate while the process tool is operating in a clean mode. Numerous other embodiments are provided.