The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 03, 2015
Filed:
Dec. 30, 2011
Applicants:
Vipul Jain, Westborough, MA (US);
Owendi Ongayi, Marlborough, MA (US);
Suzanne Coley, Mansfield, MA (US);
Anthony Zampini, Westborough, MA (US);
Inventors:
Vipul Jain, Westborough, MA (US);
Owendi Ongayi, Marlborough, MA (US);
Suzanne Coley, Mansfield, MA (US);
Anthony Zampini, Westborough, MA (US);
Assignee:
Other;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); G03F 7/11 (2006.01); G03F 7/09 (2006.01);
U.S. Cl.
CPC ...
G03F 7/09 (2013.01); G03F 7/094 (2013.01); G03F 7/091 (2013.01); G03F 7/11 (2013.01); G03F 7/092 (2013.01);
Abstract
Organic coating compositions, particularly antireflective compositions, that comprise a component that comprises one or more parabanic acid moieties. Preferred compositions of the invention can reduce reflection of exposing radiation from a substrate back into an overcoated photoresist layer and can serve as a planarizing, conformal or via-fill layer.