The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 24, 2015
Filed:
Jun. 09, 2011
Essam Mina, South Burlington, VT (US);
Guoan Wang, South Burlington, VT (US);
Wayne H. Woods, Jr., Burlington, VT (US);
Essam Mina, South Burlington, VT (US);
Guoan Wang, South Burlington, VT (US);
Wayne H. Woods, Jr., Burlington, VT (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
On-chip, high performance, slow-wave coplanar waveguide with through-silicon via structures, method of manufacture and design structures for integrated circuits are provided herein. The method includes forming at least one ground plane layer in a substrate and forming a signal layer in the substrate, in a same plane layer as the at least one ground. The method further includes forming at least one metal filled through-silicon via between the at least one ground plane layer and the signal layer.