The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 17, 2015
Filed:
Dec. 22, 2011
Martinus Cornelis Maria Verhagen, Valkenswaard, NL;
Roelof Frederick DE Graaf, Veldhoven, NL;
Johannes Henricus Wilhelmus Jacobs, Eindhoven, NL;
Franciscus Johannes Herman Maria Teunissen, Rotterdam, NL;
Jurgen Benischek, Geldrop, NL;
Martinus Cornelis Maria Verhagen, Valkenswaard, NL;
Roelof Frederick De Graaf, Veldhoven, NL;
Johannes Henricus Wilhelmus Jacobs, Eindhoven, NL;
Franciscus Johannes Herman Maria Teunissen, Rotterdam, NL;
Jurgen Benischek, Geldrop, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
An apparatus configured to de-gas a liquid includes a semi-permeable membrane having a first side on which the liquid is provided; and (i) a vaporizer configured to provide vapor of the liquid to a second side of the membrane; or (ii) a gas inlet configured to provide a gas to the second side of the membrane, the gas adapted to dissociate when dissolved in the liquid and an ion exchanger for the liquid downstream of the semi-permeable membrane.