The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 17, 2015
Filed:
Mar. 30, 2012
Applicants:
Masaki Shima, Uji, JP;
Yoshinori Wakamiya, Sumoto, JP;
Shuji Osono, Sammu, JP;
Satohiro Okayama, Chigasaki, JP;
Hideyuki Ogata, Chigasaki, JP;
Inventors:
Masaki Shima, Uji, JP;
Yoshinori Wakamiya, Sumoto, JP;
Shuji Osono, Sammu, JP;
Satohiro Okayama, Chigasaki, JP;
Hideyuki Ogata, Chigasaki, JP;
Assignees:
SANYO Electric Co., Ltd., Moriguchi-shi, JP;
ULVAC, Inc., Chigasaki-shi, JP;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H05B 3/68 (2006.01); C23C 16/44 (2006.01); C23C 16/24 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
C23C 16/44 (2013.01); C23C 16/24 (2013.01); H01L 21/68757 (2013.01);
Abstract
In a catalytic CVD equipment, a holder includes an antireflective structure for preventing reflection of a radiant ray that is ejected from the catalytic wire toward the side of the substrate.