The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 17, 2015

Filed:

Feb. 14, 2012
Applicants:

Yuji Sone, Kanagawa, JP;

Naoyuki Ueda, Kanagawa, JP;

Yuki Nakamura, Tokyo, JP;

Yukiko Abe, Kanagawa, JP;

Kazuhiro Murata, Ibaraki, JP;

Kazuyuki Masuda, Ibaraki, JP;

Inventors:

Yuji Sone, Kanagawa, JP;

Naoyuki Ueda, Kanagawa, JP;

Yuki Nakamura, Tokyo, JP;

Yukiko Abe, Kanagawa, JP;

Kazuhiro Murata, Ibaraki, JP;

Kazuyuki Masuda, Ibaraki, JP;

Assignees:

Ricoh Company, Ltd., Tokyo, JP;

Sijtechnology, Inc., Ibaraki, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/4763 (2006.01); H01L 21/768 (2006.01); H05K 3/46 (2006.01);
U.S. Cl.
CPC ...
H01L 21/76802 (2013.01); H05K 3/4644 (2013.01); H05K 2203/308 (2013.01);
Abstract

A hole formation method including applying a pillar-forming liquid to a base material, to thereby form a pillar; applying an insulating film-forming material to the base material on which the pillar has been formed, to thereby form an insulating film; removing the pillar to form an opening in the insulating film; and heat treating the insulating film in which the opening has been formed.


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