The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 17, 2015

Filed:

Mar. 15, 2013
Applicant:

Samsung Electronics Co, Ltd., Suwon-si, KR;

Inventors:

Young-Ja Kim, Asani-si, KR;

Jun-Young Ko, Cheonan-si, KR;

Dae-Young Jeong, Daejeon, KR;

Dae-Sang Chan, Asan-si, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); B05C 13/02 (2006.01); B29C 65/00 (2006.01); B05D 5/12 (2006.01); H01L 21/56 (2006.01);
U.S. Cl.
CPC ...
H01L 21/56 (2013.01); H01L 2924/0002 (2013.01);
Abstract

A method of fabricating a semiconductor device comprises loading a circuit board including a semiconductor chip into underfill equipment, positioning the circuit board on a depositing chuck of the underfill equipment, filling an underfill material in a space between the semiconductor chip and the circuit board placed on the depositing chuck; transferring the circuit board including the underfill material so that it is positioned on a post-treatment chuck of the underfill equipment; heating the underfill material of the circuit board placed on the post-treatment chuck in a vacuum state, and unloading the circuit board, of which the underfill material has been heated in the vacuum state, from the underfill equipment.


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