The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 10, 2015
Filed:
Mar. 11, 2013
Applicant:
Ekc Technology, Inc., Hayward, CA (US);
Inventor:
Chia-Yin Joyce Wei, Jhubei, TW;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C11D 7/50 (2006.01); H01L 21/02 (2006.01); C11D 11/00 (2006.01); C11D 7/26 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02052 (2013.01); C11D 11/0047 (2013.01); C11D 7/265 (2013.01); C11D 7/50 (2013.01); H01L 21/02071 (2013.01);
Abstract
Al post-etch residue removal composition doped with an alkanoic acid of the formula R—COOH, where R can be a linear or branched alkyl group in the form of CH, where n is from 4 to 19, simultaneously passivates exposed Al surfaces while removing post-etch residues.