The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 03, 2015
Filed:
Apr. 15, 2009
Windy Lynn Farnsworth, New Milford, CT (US);
Sohrab Simani, Waltham, MA (US);
Windy Lynn Farnsworth, New Milford, CT (US);
Sohrab Simani, Waltham, MA (US);
ASML Holding N.V., Veldhoven, NL;
Abstract
An apparatus for supporting an optical element is provided. The apparatus includes a lens cell () and a plurality of fingers () coupled to the lens cell. Each finger includes a base () configured to be coupled to the optical element when mounted therein, first () and second () flexures coupled at first respective ends to and extending from the base () at a divergence angle between about 75 and 165 degrees, and a mounting member () configured to couple together second respective ends of the first and second flexures. The mounting member thereby couples the base () to the lens cell ().