The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 03, 2015
Filed:
Mar. 18, 2011
Larry K. Carmichael, Platterville, CO (US);
Jesse A. Weber, Arvada, CO (US);
John H. Henry, Broomfield, CO (US);
Michael N. Schott, Loveland, CO (US);
Gerardo A. Brucker, Longmont, CO (US);
Kenneth D. Van Antwerp, Jr., Colorado Springs, CO (US);
Larry K. Carmichael, Platterville, CO (US);
Jesse A. Weber, Arvada, CO (US);
John H. Henry, Broomfield, CO (US);
Michael N. Schott, Loveland, CO (US);
Gerardo A. Brucker, Longmont, CO (US);
Kenneth D. Van Antwerp, Jr., Colorado Springs, CO (US);
MKS Instruments, Inc., Andover, MA (US);
Abstract
An ionization gauge that measures pressure has an electron source that emits electrons, and an anode that defines an ionization space. The gauge also includes a collector electrode to collect ions formed by an impact between the electrons and a gas and to measure pressure based on the collected ions. The electron source is dynamically varied in emission current between a plurality of emission levels dependent on pressure and a second parameter other than pressure. The ionization gauge may also vary various operating parameters of the gauge components according to parameters stored in a non-volatile memory and selected by a user.